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Tender Details
- Country: Czech Republic
- Summary: Optical Recorder of Nanostructures and Microstructures for Quantum Technologies
- CZT Ref No: 78572446
- Deadline: 10 Mar 2023
- Competition: ICB
- Financier: Self Financed
- Purchaser Ownership: Public
- Tender Value: 3884000.00
- Notice Type: Tender
- Document Ref. No.: 083324-2023
- Purchaser's Detail :
- Description :
- The subject of the contract is the delivery of a compact optical lithography system with simple operation, which enables direct writing into the photoresist at high speed without the use of a mask. The system must enable writing to both large areas with variable resolution and multiple sub-millimeter wafers simultaneouslyprobably in high resolution, as well as multiple recording with precise alignment and the possibility of a virtual preview before exposure. A 385 nm light source (with a possible deviation of +/-5 nm), which is suitable for positive and negative, broadband, g-, h-, i-line and also usable for SU-8 photoresists. The system must allow dlolasting exposure in high resolution with effective suppression of vibrations and temperature fluctuations. The system must include a control unit, lithography control software and real-time imaging.
Doc Title: Optical instruments
Contract Type: Supplies - Documents :
Purchaser : CZECH TECHNICAL UNIVERSITY IN PRAGUE
Address : 115 19 Praha1
Town : Prague
NUTS-Code : CZ01 - Praha
Postal Code : 16000
Contact Point : Mgr. Zuzana Hradil Gawlova, lawyer
Phone: 420 739602945
Email :akhradilgawlova@seznam.cz
URL :https://www.fjfi.cvut.cz/cz/
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